Prod Model: |
ZLH706 |
Weight: |
660kg |
Dicing Wafer: |
6" |
Product Description
The ZLH 706 Laser saw machine is using industrial lasers, linear motor workbench and straight drive rotary platform, assisted by CCD image monitoring and positioning system, to cutting semiconductor wafer.
The machine has mounted with LCD touch screen, man-machine operation interface; the image alignment of the work piece is simple and convenient to improve the operation convenience. The self design software is used in the control system to improve the cutting efficiency. The equipment has high reliability, low cost maintenance and stable performance
Feature
Interactive man-machine operation interface
15" high resolution touch screen;
Easy operation, highly working efficiency;
Fiber Laser adopted;
Laser wave is 1064 nm;
Power rating is 20W@20KHz;
Linear motor workbench with 2um accuracy.
Application
IC wafer, GPP, diode wafer, monocrystalline, polysilicon, amorphous silicon solar cells, scribing dicing for silicon wafer, slotting for LOW-K materials, etc.
Specification
Work size | | Φ6" |
Dicing depth | | Max.0.12mm |
Laser power | | 20 W |
Cutting speed | | 1-150 mm/s |
X-axis | Drive | Linaer motor |
Stroke(Working range) | Max. 160mm |
Resolution | 0.001mm |
Step size | 0.001mm |
Accuracy | <0.006mm/150mm |
Repeat accuracy | 0.002mm |
Y-axis | Drive | Linear motor |
Stroke(Working range) | Max.160mm |
Resolution | 0.001mm |
Step size | 0.001mm |
Accuracy | <0.006mm/150mm |
Repeat accuracy | 0.002mm |
θ-axis | Drive | DD motor |
Rotation range | 360° |
Revolving | 120rpm |
Resolution | 0.0005° |
Panel | OS | Windows |
Operation interface | English, Touch-screen |
Microscope light | LED |
Working condition | Power supply | Two phase 220-240ACV;50HZ |
Max. Power consumption | 1.5 Kw |
Compress air pressure | 0.4-0.8MPa |
Exhaust air | 5m³/min |
| Dimension D*W*H | 1220mm×810mm×1650mm |
| Weight | Approx.660KG |
Shenyang Academy of Instrumentation Science Co., Ltd. Was derectly belonging to Ministry of Machinery Industry as a large comprehensive scientific research academyt, now is subject to China National Machinery Industry Corporation (SINOMACH). Name listed in national comprehensive technology ability 100 research academies & institutes, AAA class credit enterprise in Liaoning province. One of the national high-tech enterprises, focus on sensor and instrument' S research, develop and manufacture.
After 40 years' Development, we have accomplished 626 scientific research items and 159 awards in state, province, ministry and city, of which there are 20 National Invention Awards and Science and Technology Progress Awards, 56 various awards in province and ministry and 80 patents and know-hows.
The main products are including:
- Pressure sensor die/wafer
- Pressure sensor & transmitter
- Dew-point transmitter
- Wafer dicing machine
- Metal bellows(Hydroformed & Electroformed)
- Optical filter & optical reflector
- Current sensor & gauss meter
We are the only manufacturer for silicon piezoresistive pressure wafer/die, and the only national research center in China.
We are the only manufacturer for electroformed metal bellows in China.
We are the largest manufacture for optical filter in China
We has passed the GB/T19001-2000. Elastic components and transducers has passed GJB9001A-2001.
We gain class AAA in both enterprise credit and banking credit.
SAIS has established a nationwide marketing network, and the products are widely employed in such military and civil industries as spaceflight, aviation, navigation, petrochemistry, Metallurgy, Heat Supply, Thermoelectricity, Hydroelectricity, Coal, Light Industry, Architecture and Pharmacy. Some of the products are exported to overseas market.
We would like to creat HB name brand, collect time elite, introduce others' Merits. It is our responsibilities to constantly increase more advanced techniques to HB products. We also strictly abide by the marketing ideology of faithfulness, carry through quality policy, innovating in products by science and technology, guarantee quality by strict administration, reduce cost by elaborated accounting, reassure clients by gualified services. We seriously complete the sales management mode of Whole Course Credit Administration, repay our clients with profound enterprise cultures, outstanding management, strong core competition abilities and qualified credit.